Auto Leveling System For Wafer Transfer
Auto Leveling System (ALS) For Wafer Transfer adjustment
- Measure 2 horizontal movement ( X, Y)
- Sampling frequency: Standard: 100Hz; Customized: 200Hz
- Wafer Size：8”、12”
- Excellent AVS software performace
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Auto Leveling System For Wafer Transfer process
Product Introduction
An auto-leveling system measures X, Y horizontal movement using a combination of sensors and techniques to enhance precision, to ensure stability and safety during wafer transfer process and increase yield.
Applications
Measurement of:
Wafer casette
FOUPs
Wafer automation handling robots
Wafer calibration equipment
Load locks
Wafer pins
Process chamber pedestrals
Technical Data Sheet
| Item | Data | |
| Measurement type | X/Y horizontal level | |
| Material | silicon/carbon fiber | |
| Sampling frequency | Sampling frequency: Standard: 100Hz; Customized: 200Hz | |
| Measurement range | Horizaontal | X,Y ±90°(± 0.01° ) |
| Connection type | bluetooth | |
| Size | 200mm、300mm (8”、12”) | |
| Weight | 145g（8”）、181g（12”） | |
| Thickness | Central：6.6mm；edge: 0.65mm ；Customized: 3.5mm | |
| ALS software | Measure and show datas of X,Y movement at real-time | |
| Data analyzer | ALS-configured computure | |