TC Wafer Wireless -RLS Wfer
RLS Wafer – TC Wafer Wirelss
Product Introduction
The primary purpose of the TC wafer wireless is to accurately measure and monitor the temperature of wafers during semiconductor processing. Precise temperature control is crucial for ensuring the quality and consistency of the manufactured devices.
The resistance temperature detector (RTD) measure temperature by correlating the resistance of the RTD material with temperature. They are made from materials like platinum due to its stable and predictable resistance-temperature relationship. The RTD sensors are typically integrated onto a silicon wafer, similar to the wafers being processed, to ensure that the temperature readings are representative of actual conditions. The system is designed wihout wire connection for sensors, allowing the capability for wireless temperature measurement application.
Specifications
No. | Item | Specification |
1 | Tolerance | ±0.05℃ |
2 | Measurement range | -40~250℃ |
3 | Temperature resolution | 0.01℃ |
4 | Sensor type | PT |
5 | Number of measurement point | 1~45 |
6 | Base material | Silicon/sapphire, etc. |
7 | Wafer size | 2”,4”,6”,8”,12” |
8 | Connection type | Wireless |
9 | Thickness | circuit area: 8mm; non-circuit area: 2mm |
10 | Lifespan | 300 hrs |
11 | Calibration lifespan | 300 hrs |
12 | Operating environment | Vacuum/atmosphere/inert gas/other |
Software demostration Interface
Applications
1. Front Track Systems
2. SC Hot Plates
3. Cold Plates
4. HMDS Chambers
5. Coating/Developing
Customization
1. Determine the temperature accuracy requirements and dimensions.
2. Determine the vacuum requirements.
3. Determine the number and arrangement of points.
Contact Us
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FAQ
Yes. Define each length of L1, L2, L3 ( Mainly consider the length that TC-wafer placed in the chamber)
Yes. We provide flexible customization service to meet our client’s needs.
Not really the same. The temperature in process should be consider when choosing the correct item. For example, TC-wafer can test within 1200℃, but On Wafer system can only test under 100℃.