TC Wafer Wireless -RTD Wfer
RTD Wafer - TC Wafer Wireless
- Wafer size: 12″
- Temperature precision: ±0.5℃
- Temperature measure range: 15~250℃
- Number of measurement point: 16
RTD Wafer – TC Wafer Wirelss
Product Introduction
The primary purpose of the TC wafer wireless is to accurately measure and monitor the temperature of wafers during semiconductor processing. Precise temperature control is crucial for ensuring the quality and consistency of the manufactured devices.
The resistance temperature detector (RTD) measure temperature by correlating the resistance of the RTD material with temperature. They are made from materials like platinum due to its stable and predictable resistance-temperature relationship. The RTD sensors are typically integrated onto a silicon wafer, similar to the wafers being processed, to ensure that the temperature readings are representative of actual conditions. The system is designed wihout wire connection for sensors, allowing the capability for wireless temperature measurement application.
Specifications
| Item | Specification |
| Wafer size | 12” |
| Wafer Material | Silicon |
| Number of measurement point | 16 Points |
| Sensor type | RTD:PT1000 |
| Temperature range | 15-250℃ (The duration of a single test at temperatures exceeding 100°C is within 300 seconds, while the duration for a single test at 80-100°C is within 1200 seconds.) |
| Use time per charge | 60 minutes |
| Precision | ±0.5℃ |
| Resolution | 0.01℃ |
| Data transmission type | bluetooth |
| Sampling | 1Hz/2Hz |
| Software | RTD Wafer dedicated software features real-time curves and wafer mapping cloud diagrams. |
| Data analyzer | The RTD Wafer temperature measurement system includes a main unit and a display device. |
| Wafer mapping function | With dynamic mapping function |
| Real time data analysis | Max、Min、Mean、3-S、Range、part Range |
Software demostration Interface
Applications
1. Front Track Systems
2. SC Hot Plates
3. Cold Plates
4. HMDS Chambers
5. Coating/Developing
Customization
1. Determine the temperature accuracy requirements and dimensions.
2. Determine the vacuum requirements.
3. Determine the number and arrangement of points.
Contact Us
Send us an inquiry! We will reply within 24 hours!
FAQ
Yes. Define each length of L1, L2, L3 ( Mainly consider the length that TC-wafer placed in the chamber)
Yes. We provide flexible customization service to meet our client’s needs.
Not really the same. The temperature in process should be consider when choosing the correct item. For example, TC-wafer can test within 1200℃, but On Wafer system can only test under 100℃.
