RTD Wafer
RTD Wafer, High Temperature Precision Testing System
- Wafer size: 4″, 6″, 8″, 12″
- Temperature precision: ±0.01℃
- Temperature measure range: -40-250℃
- Number of measurement point: 1~97
RTD Wafer
Product Introduction
RTD Wafer(Or called the Instrumented Wafer or Bonded Wafer) is a temperature sensor that uses a special processing technology to embed temperature sensors (resistance temperature detector) at specific locations on the wafer surface, thus realizing real-time temperature measurement of the wafer surface.
Through RTD Wafer, the real-time temperature measurement values of specific points on the wafer and the temperature distribution of the overall wafer can be obtained; it can also be used to continuously monitor the transient temperature changes of the wafer during the heat treatment process.
The instrumented wafers are being used in many industries including Rapid Thermal Processing (RTP), Rapid Thermal Annealing (RTA), coating /developing.
Specifications
No. | Item | Specification |
1 | Tolerance | ±0.05℃ |
2 | Measurement range | -40~250℃ |
3 | Precision | 0.01℃ |
4 | Sensor type | PT |
5 | Number of measurement point | 1~97 |
6 | Base material | Silicon/sapphire, etc. |
7 | Wafer size | 2”，4”，6”，8”，12” |
8 | Connection type | Wire/Wireless |
9 | Thickness | 2~3.5mm |
10 | Lifespan | 6 months |
11 | Calibration lifespan | 6 months |
12 | Operating environment | Vacuum/atmosphere/inert gas/other |
Software demostration Interface
Applications
1. Front Track Systems
2. SC Hot Plates
3. Cold Plates
4. HMDS Chambers Coating/developing
Customization
1. Determine the temperature accuracy requirements and dimensions.
2. Determine the vacuum requirements.
3. Determine the number and arrangement of points.
4.Determine the length of the lead wire.
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FAQ
Yes. Define each length of L1, L2, L3 ( Mainly consider the length that TC-wafer placed in the chamber)
Yes. We provide flexible customization service to meet our client’s needs.
Not really the same. The temperature in process should be consider when choosing the correct item. For example, TC-wafer can test within 1200℃, but On Wafer system can only test under 100℃.
