AMS (Auto Multi Sensor)
AMS (Auto Multi Sensor) For Wafer Transfer Test
- Measurement type: Acceleration, leveling angle, humidity and temperature
- Wafer Size: 200mm, 300mm
- Horizontal angle: X,Y,±45°(±0.05°)
- Sampling method: Continuous sampling 5Hz
AMS Wafer -Auto Multi-Sensors
Product Introduction
The AMS Wafer (Auto Multiple Sensor) is a unique tool that integrates multiple sensor modules onto a single circuit board. This allows it to quickly measure vibration, acceleration, level, and humidity, making it a versatile and efficient solution for semiconductor equipment debugging.
Wafer transfer measurement is performed at locations such as the robot. AMS Wafer can calculate its acceleration during the transfer process, and also can measure the temperature and humidity inside the chamber.
Specifications
| Item No. | Data | |
| Measure type | Acceleration, leveling angle, humidity and temperature | |
| Sampling rate | Standard: 100Hz/Customized: 100-500Hz | |
| Measure type | Horizontal | X,Y,±45°(±0.05°) |
| Acceleration | X/Y/Z ±4g | |
| RMS | X/Y/Z ±4g | |
| Temperature | 0℃-80℃ | |
| Humidity | 0%RH-100%RH | |
| Precision | Horizontal | ±0.05 deg |
| Acceleration | ±0.005g | |
| RMS | ±0.005g | |
| Temperature | 0.3℃～0.5℃ | |
| Humidity | 2%～3% | |
| Connection | bluetooth | |
| Wafer size | 300mm (12”) | |
| Thickness | Center：6.6mm；edge：0.8mm | |
| Thickness | 181g（12”） | |
| Use time per charge | Continuous use 2h | |
| Application | Wafer transfer test, OHT monitoring, AMHS monitoring, temp and humidity test. | |
Software demostration Interface
Applications
Wafer transfer test
OHT monitoring
AMHS monitoring,
Wafer temperature and humidity test