TC Wafer Wireless -RLS Wfer

The primary purpose of the TC wafer wireless is to accurately measure and monitor the temperature of wafers during semiconductor processing. Precise temperature control is crucial for ensuring the quality and consistency of the manufactured devices.

The resistance temperature detector (RTD) measure temperature by correlating the resistance of the RTD material with temperature. They are made from materials like platinum due to its stable and predictable resistance-temperature relationship. The RTD sensors are typically integrated onto a silicon wafer, similar to the wafers being processed, to ensure that the temperature readings are representative of actual conditions. The system is designed wihout wire connection for sensors, allowing the capability for wireless temperature measurement application.