AMS Wafer
AMS Wafer - Auto Muti-Sensors
- Measurement type: Acceleration, leveling angle, humidity and temperature
- Wafer Size: 200mm, 300mm
- Horizontal angle: X,Y,±45°(±0.05°)
- Sampling method: Continuous sampling 5Hz
AMS Wafer -Auto Multi-Sensors
Product Introduction
The AMS Wafer (Auto Multiple Sensor) is a unique tool that integrates multiple sensor modules onto a single circuit board. This allows it to quickly measure vibration, acceleration, level, and humidity, making it a versatile and efficient solution for semiconductor equipment debugging.
Wafer transfer measurement is performed at locations such as the robot. AMS Wafer can calculate its acceleration during the transfer process, and also can measure the temperature and humidity inside the chamber.
Specifications
Software demostration Interface
No. | Item | Specification |
1 | Measurement type | Acceleration, leveling angle, humidity and temperature |
2 | Sampling rate | 10Hz |
3 | Measurement range | Horizontal angle: X,Y,±45°(±0.05°) |
4 | Acceleration：±2g | |
5 | Temperature: 0℃-80℃ (±0.3℃ ) | |
6 | Humidity: 0%RH-100%RH (±2%RH) | |
7 | Connection type | Bluetooth |
8 | Size | 200mm、300mm (8”, 12”) |
9 | Weight | Approx. 200g |
10 | Sampling method | Continuous sampling 5Hz |
Applications
Wafer transfer measurement is performed at locations such as the robot. AMS Wafer can calculate its acceleration during the transfer process, and also can measure the temperature and humidity inside the chamber, making it a versatile and efficient solution for semiconductor equipment debugging.
Contact Us
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FAQ
Yes. Define each length of L1, L2, L3 ( Mainly consider the length that TC-wafer placed in the chamber)
Yes. We provide flexible customization service to meet our client’s needs.
Not really the same. The temperature in process should be consider when choosing the correct item. For example, TC-wafer can test within 1200℃, but On Wafer system can only test under 100℃.
