About Rsuwei
Company Profile
Suzhou Rsuwei Semiconductor Technology Co.,Ltd. is a high-tech enterprise dedicated to wafer temperature measurement systems, providing solutions for high-precision wafer temperature measurement and calibration systems. Our mission is to lead the future through innovative technology and excellent service.
Since its establishment, Rsuwei has been committed to the research and development as well as production of high-quality wafer temperature and calibration measurement systems for wafers ranging from 2 to 12 inches. Our team consists of experienced engineers, technical experts, and professional sales personnel. We have also established joint laboratories with universities to deepen the development of core technology research and manufacturing, continuously achieving breakthrough progress.
Rsuwei is dedicated to promoting the localization of semiconductor wafer temperature and calibration measurement systems in China.
Company Advantages
High Accuracy
Rsuwei Wafer Temperature Measurement System has a high-precision temperature measurement capability. The wafer temperature measurement system includes high-precision temperature sensors, which can realize the overall temperature monitoring of the wafer. The wafer temperature measurement has extremely high temperature measurement accuracy, longer service life, and stronger safety.
Precise Tempreture Measurement
Rsuwei focuses on the research and development of high-precision temperature measurement products. Its products can accurately reflect the real temperature of the wafer, further improve the reliability and accuracy of process technology, and improve product quality and performance indicators.
Powerful Thermal Field System
Rsuwei Wafer Temperature Measurement System has a powerful temperature field system, which enables it to precisely control the temperature in many high-temperature processes in the production process of semiconductor plants, so as to meet the requirements of parameters such as wafer film thickness and stress.
Highly Flexible Customization Service
Rsuwei is not only focused on the research and development of high-precision temperature measurement products, but also provides highly flexible customized services to meet the specific needs of different customers. The software interface has excellent software functions, which can display temperature field profile and real-time temperature rise curve in real time.
Applications
TC Wafer
> Furnace
> PVD chamber
> CVD chamber
> RTP/rta chamber
> Strippers
> Vacuum Reflow Oven
> ECP：oring（180℃-300℃）
On Wafer
>Plasma Etch poly
（EtchTemp）
>Plasma Etch metal（
EtchTemp-HD、EtchTemp SE-HD、
EtchTemp-SE）
>Ion implantation(20-140°C)
Contact Us
Send us an inquiry! We will reply within 24 hours!
FAQ
Yes. Define each length of L1, L2, L3 ( Mainly consider the length that TC-wafer placed in the chamber)
Yes. We provide flexible customization service to meet our client’s needs.
Not really the same. The temperature in process should be consider when choosing the correct item. For example, TC-wafer can test within 1200℃, but On Wafer system can only test under 100℃.
